electrostatically actuated fgm microgripper under the effect of thermal moment
Authors
abstract
in previous researches, mechanical behavior of a microgripper with homogenous and the same material has been studied. in this paper considering the desired characteristics of fgms, as a good thermal and wear resistance, the mechanical behavior of fgm microgripper under dc voltage and temperature variations is investigated. it is assumed that the two microbeams of the fgm microgripper are mounted symmetrically against each other and one side of the microbeams is made of a pure metal the other side is a mixture of metal and ceramic, and the percentage of ceramic varies exponentially through the microbeams thickness. the nonlinear equations governing the static deflection of microbeams due to the application of dc voltage and the temperature changes are derived and solved using the step by step linearization method and the galerkin method. the response and the stability of the system against the variation of dc voltage and temperature are investigated. also, the effect of geometrical dimensions, ceramic percentage and its variations through the microbeams thickness on the mechanical behavior and the system stability are studied.
similar resources
Electrostatically Driven Microgripper
In this work we report on microactuators and microgrippers fabricated from SOI (Silicon On Insulator) wafers by a surface and bulk micromachining fabrication technology. The main advantages of this technology are: a) large thickness of the devices (10 μm up to 40 μm) resulting in devices which are stable against disturbing forces perpendicular (z-direction) to the ground plate. b) the small num...
full textMechanical Behavior of an Electrostatically-Actuated Microbeam under Mechanical Shock
In this paper static and dynamic responses of a fixed-fixed microbeam to electrostatic force and mechanical shock for different cases have been studied. The governing equations whose solution holds the answer to all our questions about the mechanical behavior is the nonlinear elasto-electrostatic equations. Due to the nonlinearity and complexity of the derived equations analytical solution are ...
full textTopology optimization of electrostatically actuated microsystems
This study addresses the design of electrostatically actuated microelectromechanical systems by topology optimization. The layout of the structure and the electrode are simultaneously optimized. A novel, continuous, material-based description of the interface between the structural and electrostatic domains is presented that allows the optimization of the interface topology. The resulting topol...
full textOn the Stability of an Electrostatically-Actuated Functionally Graded Magneto-Electro-Elastic Micro-Beams Under Magneto-Electric Conditions
In this paper, the stability of a functionally graded magneto-electro-elastic (FG-MEE) micro-beam under actuation of electrostatic pressure is studied. For this purpose Euler-Bernoulli beam theory and constitutive relations for magneto-electro-elastic (MEE) materials have been used. We have supposed that material properties vary exponentially along the thickness direction of the micro-beam. Gov...
full textPull-in Dynamics of Electrostatically-actuated Beams
We report the experimental measurement and simulation of the transient electrostatic pull-in characteristics of microstructural beams fabricated with silicon surface micromachining. Pull-in dynamics are investigated under the influence of compressible squeezed-film damping (CSQFD) for large amplitude motion. A linearized one-dimensional model, using a fitted damping constant, and a two-dimensio...
full textReview of modeling electrostatically actuated microelectromechanical systems
A wide range of microelectromechanical systems (MEMSs) and devices are actuated using electrostatic forces. Multiphysics modeling is required, since coupling among different fields such as solid and fluid mechanics, thermomechanics and electromagnetism is involved. This work presents an overview of models for electrostatically actuated MEMSs. Three-dimensional nonlinear formulations for the cou...
full textMy Resources
Save resource for easier access later
Journal title:
علوم کاربردی و محاسباتی در مکانیکجلد ۲۳، شماره ۲، صفحات ۱۶-۰
Hosted on Doprax cloud platform doprax.com
copyright © 2015-2023